Semiconductor Field

FeaturesFeatures

• Excellent sealing performance even in ultra-low temperature environments where other materials cannot be used
• Excellent plasma resistance in low-temperature environments

*Relative comparison with three materials

ApplicationsExample

• Semiconductor manufacturing equipment for low-temperature and plasma environments (etching equipment, CVD equipment, etc.)

Attention!

The information and data presented here are measured values that we believe to be reliable, but are not standard values. Check the conditions of each individual case before using the product.

Metal O-ring

FeaturesFeature

• Can be used from ultra-low temperatures of -270°C to high temperatures of +700°C
• Capable of sealing from ultra-high pressure of 300 MPa to ultra-high vacuum of 1.3 × 10-10 Pa
• Compact design of equipment is possible due to the small space required for the seal
• Combination of various materials, surface finishes, and surface coatings provide for optimal design

Metal O-ring

Metal Variant-shaped O-ring

SUNLIMES Series

FeaturesFeature

• A completely new type of metal seal that provides excellent sealing characteristics with low tightening force

Tightening force (ratio to metal O-ring)

• SUNLIMES® I: Approx. 1/3
• SUNLIMES® II: Approx. 1/5
• SUNLIMES® III: Approx. 3/4 to 1/3

*SUNLIMES® is a registered trademark of Mitsubishi Cable Industries, Ltd.

SUNLIMES® I

SUNLIMES® II

SUNLIMES® III

Attention!

The information and data presented here are measured values that we believe to be reliable, but are not standard values. Check the conditions of each individual case before using the product.

FeaturesFeature

• Outstanding plasma resistance
  • 20 times that of general-purpose fluoroelastomers
  • Crack resistance equivalent to perfluoroelastomer or better
• Low-particle
  • Carbon black not used
  • Low content metal
  • Antistatic properties
• Compliance with various environmental regulations
  • REACH, RoHS, POPs Convention
  • PFOA and PFOS free

Plasma resistance

• Equipment: Microwave radical generator
• Condition:O₂＋CF₄、100Pa, percent elongation

SUNELAST® E

General-purpose fluoroelastomer

ApplicationsExample

• Semiconductor manufacturing equipment in plasma environment (etching equipment, CVD equipment, etc.)

Attention!

The information and data presented here are measured values that we believe to be reliable, but are not standard values. Check the conditions of each individual case before using the product.

Fluoroelastomer

UE processing

• Reduces adherence to metal
• Reduces adhesion and sliding resistance

*O-ring attached to flange (SUS304), 25% compression by vacuum, 150°C × 24 h heating

For silicone rubber

RE-O processing

• Reduces adherence to quartz
• Reduces adhesion

*O₂ gas 100 ml/min, RF output 500 W, pressure 200 MPa, operation time after 100 hours

Applications ExampleExample

• Measures to prevent adhesion to metal and quartz
• Measures to reduce sliding resistance

Attention!

The information and data presented here are measured values that we believe to be reliable, but are not standard values. Check the conditions of each individual case before using the product.

Attention!

The information and data presented here are measured values that we believe to be reliable, but are not standard values. Check the conditions of each individual case before using the product.

FeaturesFeature

• Excellent resistance to various chemicals and organic solvents that cannot be used with rubber seals
• Wide temperature range from -200 to +250°C
• Available in a wide pressure range up to 13.7 MPa
• Can be used as static or low speed dynamic seals
• Material: SUNFLON® (PTFE) ring + SUS spring

Attention!

The information and data presented here are measured values that we believe to be reliable, but are not standard values. Check the conditions of each individual case before using the product.

Attention!

The information and data presented here are measured values that we believe to be reliable, but are not standard values. Check the conditions of each individual case before using the product.

Compression characteristics(*JIS K 6262 large test piece 25% compression)

200℃ × 70H

Compression set (%)

Chemical resistance (percent change in volume from immersion test)

*For sealing materials with improved chemical resistance, please refer to the SUNELAST I® page.

Attention!

The information and data presented here are measured values that we believe to be reliable, but are not standard values. Check the conditions of each individual case before using the product.

Read more about our research and development structure

Attention!

The information and data presented here are measured values that we believe to be reliable, but are not standard values. Check the conditions of each individual case before using the product.

Low adhesion

Suitable for use in opening/closing parts such as chamber lids.

Adhesive force [N]

Test conditions

• Test sample:O ring (AS-214 size)
• Mating material: SUS304
• Surface roughness: Ra3.2μm
• Squeeze rate: 25%
• Processing conditions:100°C × 70 hours
• After processing, adhesion force at flange opening is measured.

Non-carbon materials

Material design that is non-carbon and high strength (hardness 70).

Attention!

The information and data presented here are measured values that we believe to be reliable, but are not standard values. Check the conditions of each individual case before using the product.

Conductive Silicone Rubber

Special conductive fillers are blended to achieve excellent electrical properties.

Attention!

The information and data presented here are measured values that we believe to be reliable, but are not standard values. Check the conditions of each individual case before using the product.

Lineup and FeaturesLineup

Lineup	Feature	Combination		Recommended operating temperature range	Conventional rubber
		Elastic body	Shield layer
Cap seal	High temperature + plasma resistance	Special fluoroelastomer	SUNFLON® ring	0°C to 180°C	Perfluoroelastomer
	Low temperature + plasma resistance	Ultra-low temperature silicone rubber		-70°C to 100°C	Silicone rubber
Cap O-ring	High temperature + gas sealing or plasma resistance	Special fluoroelastomer	SUNFLON®Rubber adhesive	0°C to 180°C	Perfluoroelastomer
	Low Temperature+Fluorine Solvent ResistanceorPlasma Resistance	Ultra-low temperature silicone rubber		-70°C to 100°C	Ethylene propylene rubber

Attention!

The information and data presented here are measured values that we believe to be reliable, but are not standard values. Check the conditions of each individual case before using the product.

FeaturesFeatures

• Highest heat-resistant properties among fluoroelastomers
• Maintains initial vacuum properties even after heating to high temperatures
• Better adhesion than standard fluoroelastomers

Attention!

The information and data presented here are measured values that we believe to be reliable, but are not standard values. Check the conditions of each individual case before using the product.