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Vacuum and Semiconductor Equipment Seal Products

Large Sized Seal

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Demand for larger sized seals gets increasing as their products themselves and manufacturing equipments get bigger. We strive to offer our solutions in order to satisfy varied requests through best mixes of our plentiful materials and unique/optimal shape designing capabilities and large item manufacturing techniques.

Feature

  • O-ring shape manufacturing available
  • Special cross-sectional shapes manufacturing available
  • Item with ID 1000mm or 39" can be manufactured

Application

CVD process chamber lid, CVD slit valve, Sputtering equipment, Etching equipment

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